ВНЕДРЕНИЕ ТЕХНОЛОГИИ FLEXIBLE SIDEWALL

Semiconductor sidewall shape estimation

For process control, linewidth measurements are commonly performed on semiconductor wafers using top-down images from critical dimension measurement scanning electron microscopes (CD-SEMs). However, a measure of the line sidewall shape will be required as linewidths continue to shrink. Sidewall shape can be measured by physically cleaving the device and performing an SEM scan of the cross secti...

Rotary Sidewall Coring—Size Matters

Sidewall quality in proton beam writing

Proton beam writing has been shown to allow the fabrication of high aspect ratio nanostructures at sub-100 nm dimension and with smooth and vertical sidewalls. For applications such as the fabrication of waveguides, sidewall smoothness is an important issue. We report results from investigations into side wall roughness measured directly with Atomic Force Microscopy. Structures were written in ...

electron transistors fabricated with sidewall spacer patterning

Fabrication of a Micromirror with Sidewall Electrodes

We designed and fabricated a micromirror with sidewall electrodes in the Cornell NanoScale Science & Technology Facility (CNF) for endoscopic application. The micromirror can perform 2-dimensional scanning. The static and dynamic performances of the micromirror are improved over that of a micromirror without sidewall electrodes. In addition, undesired spring-softening effect that is commonly fo...